The 77th JSAP Autumn Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[16a-A21-1~12] 15.4 III-V-group nitride crystals

Fri. Sep 16, 2016 9:00 AM - 12:15 PM A21 (Main Hall A)

Motoaki Iwaya(Meijo Univ.), Yoshiki Saito(TOYODA GOSEI)

12:00 PM - 12:15 PM

[16a-A21-12] Thermodynamic Consideration of Nitride Semiconductor Growth Mechanism

〇(M1)Kazuki Sekiguchi1, Hiroki Shirakawa1, Kenta Chokawa1, Masaaki Araidai1,2, Yoshihiro Kangawa3, Koichi Kakimoto3, Kenji Shiraishi1,2 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.RIAM, Kyushu Univ.)

Keywords:nitride semiconductor, MOVPE, thermodynamic analysis