[16a-A24-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

[16a-A24-1] Preparation of axial type wire-structure crystalline silicon solar cells.

〇YUSUKE SHIRAYANAGI¹, YASUTOSHI YASHIKI¹, SHINYA KATO², MAKOTO KONAGAI^1,3 (1.JST., 2.Nagoya. Inst. Tech., 3.Tokyo City Univ.)

Keywords:solar cell, wire-structure

An axial type micro-wire crystalline silicon solar cell structure has been studied. In this structure, a number of micro wires (Si-MW) were fabricated on a p-type Si wafer, and an n-layer was formed on the top of each Si-MW to make p-n junction. To form the Si-MW’s, a deep reactive ion etcher based on the Bosch process was used. After that, the surface of Si-NW’s were filled with Al_1-xO_x deposited by the ALD, and then the Al_1-xO_x on the n-layer was removed by the CMP to make electric contact. As a result, we obtain a conversion efficiency of 8.2% in the axial type wire-structure solar cell.
We will also discuss the details of photovoltaics performances as compared with a radial type Si-MW solar cell in which the n-layer covers on the entire surface of the p-type Si-MW’s.