[16a-A24-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

[16a-A24-6] Development of removal method of phosphorous impurity in Si purification process by high-pressure hydrogen plasma chemical transport

〇Hiromasa Ohmi¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹ (1.Osaka University)

Keywords:Silicon, purification, plasma