[16a-B2-1~13] 3.9 Terahertz technologies

[16a-B2-5] Evaluation of THz antireflective structures fabricated by ultrashort pulse laser ablation

〇Jongsuck Bae¹, Mahiro Taketuchi¹, Xi Yu¹, Ryosuke Ito¹, Keisuke Ito¹, Shingo Ono¹ (1.Nitech)

Keywords:antireflection sturucture, terahertz, ultrashort pulse laser ablation

We will present evaluation results of an antireflection effect in broadband ati-reflective surface relief structures on Si and GaAs substrates fabricated by ultrashort pulse laser ablation at terahertz frequencies.