[16a-B3-1~6] 6.5 Surface Physics, Vacuum

[16a-B3-5] Evaluation of Damage-free Contact Probe for Electric Property Measurements

〇Michiko Yoshitake¹, Toshiki Shiomi², Kentaro Kinoshita^2,3, Satoru Kishida^2,3 (1.NIMS, 2.Tottori Univ., 3.TiFREC)

Keywords:electric measurement, contact area, prober

Durabitily of developed electric contact probe, which enables to have electric contact to nm-thick films and 2D films without damaging the specimen, has been evaluated with different size of controlled contact area. Results of electric resistance measurements using ordinary W probe, developed area-controlled probe have been compared.