The 77th JSAP Autumn Meeting, 2016

Presentation information

Oral presentation

8 Plasma Electronics » 8.5 nanotechnology.

[16a-B7-1~9] 8.5 nanotechnology.

Fri. Sep 16, 2016 9:00 AM - 11:30 AM B7 (Exhibition Hall)

Osamu Sakai(Univ. of Shiga Pref.)

9:30 AM - 9:45 AM

[16a-B7-3] Synthesis of graphene by RF Magnetron Plasma-Enhanced Chemical Vapor Deposition

〇(M1)Satoshi Ishidoshiro1, Shunya Yamada1, Yuma Kawamura1, Yasuaki Hayashi1 (1.Kyoto Inst.Technol.)

Keywords:graphene, RF magnetron plasma