9:30 AM - 9:45 AM
[16a-B7-3] Synthesis of graphene by RF Magnetron Plasma-Enhanced Chemical Vapor Deposition
Keywords:graphene, RF magnetron plasma
Oral presentation
8 Plasma Electronics » 8.5 nanotechnology.
Fri. Sep 16, 2016 9:00 AM - 11:30 AM B7 (Exhibition Hall)
Osamu Sakai(Univ. of Shiga Pref.)
9:30 AM - 9:45 AM
Keywords:graphene, RF magnetron plasma