[16a-C42-1~11] 1.5 Instrumentation, measurement and Metrology

[16a-C42-4] 2D-Orthogonal Grid Plate Calibrator

〇Mariko Kajima¹, Tsukasa Watanabe¹, Makoto Abe¹ (1.NMIJ/AIST)

Keywords:2D grid plate, Imaging CMM, laser interferometer

2D grid plates are used for checking the accuracy of imaging CMMs as the reference standards. We calibrate the 2D drid plates by using grid plate calibrator, which is based on an imaging CMM and laser interferometers are attached on it. For the purpose of reducing geometrical error of the calibrator, multi-step method is applied. In this method, the final measurement result is achieved by averaging four results, that are achieved in four setting orientations. The defects of this method are that it require a lot of procedures and time. In this study, we are going to develop a X-Y axises orthogonal laser interferometer system on the grid plate calibrator, and principally reduce the geometrical error of the calibrator. By this 2D orthogonal calibrator, the measurement procedure would be simplified.