10:00 AM - 10:15 AM
[16a-D61-5] Effects of ion implantation on strain relaxation of SiGe films on Si(110) substrates
Keywords:Si(110), ion-implantation
Oral presentation
15 Crystal Engineering » 15.5 Group IV crystals and alloys
Fri. Sep 16, 2016 9:00 AM - 11:45 AM D61 (Bandaijima Bldg.)
Taizoh Sadoh(Kyushu Univ.)
10:00 AM - 10:15 AM
Keywords:Si(110), ion-implantation