The 77th JSAP Autumn Meeting, 2016

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Poster presentation

3 Optics and Photonics » 3.2 Equipment optics and materials

[16a-P1-1~12] 3.2 Equipment optics and materials

Fri. Sep 16, 2016 9:30 AM - 11:30 AM P1 (Exhibition Hall)

9:30 AM - 11:30 AM

[16a-P1-7] Three-dimensional microfabrication to the photoresist using a CW laser direct drawing way by liquid immersion object lens

〇(M1)Shinji Nakata1, Egami Chikara1 (1.Shizuoka Univ.)

Keywords:Nonlinear optics, Laser processing, Photoresist