[16p-A22-1~6] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16p-A22-1] Study on solid-phase-crystallization temperature in amorphous undoped/V-doped ZnO stacked film on c-face sapphire

〇Akihiro Watanabe¹, Tomoyuki Kawashima¹, Katsuyoshi Washio¹ (1.Tohoku Univ.)

Keywords:Zinc Oxide, RF magnetron sputter, Solid-phase crystallization

アモルファスZnO/V添加ZnO積層膜における固相成長温度がZnO結晶化と副相形成に及ぼす影響を検討した。