The 77th JSAP Autumn Meeting, 2016

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Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16p-A22-1~6] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Fri. Sep 16, 2016 12:45 PM - 2:15 PM A22 (Main Hall B)

Hiroyuki Nishinaka(Kyoto Inst. of Tech.)

1:00 PM - 1:15 PM

[16p-A22-2] Evaluation of Zinc Sulfide Films Formed by Mist Chemical Vapor Deposition

〇Koshi Okita1, Kensuke Minami1, Satomi Teraya1, Shoji Nagaoka3,4, Zenji Yatabe2, Yusui Nakamura1,4 (1.Kumamoto Univ. GSST, 2.Kumamoto Univ. POIE, 3.Kumamoto IRI, 4.Phoenics)

Keywords:Zinc Sulfide, Mist CVD