The 77th JSAP Autumn Meeting, 2016

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Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16p-A22-1~6] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Fri. Sep 16, 2016 12:45 PM - 2:15 PM A22 (Main Hall B)

Hiroyuki Nishinaka(Kyoto Inst. of Tech.)

1:15 PM - 1:30 PM

[16p-A22-3] Solid-phase crystallization of amorphous CuCrO2 thin films on c-face sapphire

〇Naotoshi Hosaka1, Hiroshi Chiba1,2, Tomoyuki Kawashima1, Katsuyoshi Washio1 (1.Tohoku Univ., 2.JSPS Research Fellow)

Keywords:Delafossite, Solid-phase crystallization, RF magnetron sputtering