1:15 PM - 1:30 PM
[16p-B7-1] Diamond growth with pulsed-microwave plasma chemical vapor deposition -2
Keywords:diamond, microwave plasma, pulsed discharge
Presentation information
Oral presentation
8 Plasma Electronics » 8.3 deposition of thin film and surface treatment
[16p-B7-1~13] 8.3 deposition of thin film and surface treatment
Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)
Kazunori Koga(Kyushu Univ.), Keiji Nakamura(Chubu Univ.)