The 77th JSAP Autumn Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Kazunori Koga(Kyushu Univ.), Keiji Nakamura(Chubu Univ.)

4:00 PM - 4:15 PM

[16p-B7-11] Radicals and ions behavior analysis by Plasma Indicator

〇Keita Hishikawa1, Yu Yamakawa1, Hiroaki Takeoka1, Keiko Nakamura1, Kazuhiro Uneyama1 (1.Sakura Color Products Corp)

Keywords:Plasma Indicator, Radicals, probe