The 77th JSAP Autumn Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Kazunori Koga(Kyushu Univ.), Keiji Nakamura(Chubu Univ.)

1:45 PM - 2:00 PM

[16p-B7-3] Comparison of hybrid facing-target sputtering and conventional facing-target sputtering in fabrication of ITO thin films

〇Shinichi Morohashi1,2, Tanimoto Tsukasa1, Tsujita Keisuke1 (1.Yamaguchi Univ., 2.AIST)

Keywords:hybrid facing-target sputtering, conventional facing-target sputtering, ITO thin films