[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

[16p-B7-9] Surface modification and improvement of shear strength by plasma treatment

〇Nobutaka Araoka¹, Kenichi Yamazaki¹, Takanori Iijima¹, Takeshi Imamura¹, Hiroyuki Yasui¹ (1.Toshiba)

Keywords:atmospheric pressure plasma, Surface modification, XPS alalysis

Multi-material with different materials is expected as breakthrough technology for various industrial needs. Multi-material with metal and epoxy resin which is pre-treated by chemical treatment is used as high-voltage insulated device. However, environmentally friendly like chemical free method in manufacturing process is expected. Non-equilibrium plasma treatment technique is focused as alternative technique of chemical treatment for gluing between metal and epoxy resin. As a result of atmospheric pressure plasma treatment to metal plate, contact angle was decreased. Then, quantity of organic particles was decreased, and hydrophilic group was increased by XPS measurement. Furthermore, shear strength between metal and epoxy resin was increased in proportion to quantity of hydrophilic group.