[16p-D61-1~12] 15.5 Group IV crystals and alloys

△ [16p-D61-7] Heavy n-type doping for poly-GeSn by using pulsed laser annealing in water

〇Kouta Takahashi^1,2, Masashi Kurosawa^1,3,4, Hiroshi Ikenoue⁵, Mitsuo Sakashita¹, Osamu Nakatsuka¹, Shigeaki Zaima^1,3 (1.Grad. Sch. of Eng., Nagoya Univ., 2.JSPS Research Fellow (DC), 3.IMaSS, Nagoya Univ., 4.PRESTO, JST, 5.Grad. Sch. of ISEE, Kyushu Univ.)

Keywords:GeSn