[16p-P2-1~5] 8.1 Plasma production and control

[16p-P2-1] Development of a Compact Atom Beam Source by Capacitively Coupled Plasma at 2.45GHz

〇Yuji Shimabukuro¹, Toshiro Kasuya¹, Motoi Wada¹ (1.Doshisha Univ.)

Keywords:Microwave plasma, Capacitively coupled plasma, Mass spectrometry

I'm developing a compact atom beam source which is aimed at applications of medical, pharmacy and biochemistry used in mass spectrometry.
Since its beam source adopt the method of capacitively coupled plasma, our device gives off little heat compared to the method of thermal crack.
Furthermore, because electric power is fed by coaxial cable, we can realize miniaturization of atom beam source drastically.