[16p-P6-1~22] 12.1 Fabrications and Structure Controls

[16p-P6-19] Metal-atom desorption from low-Tg polymer surface and its application to high-efficient metal-vapor integration

〇Riku Ou¹, Ryo Nishimura², Kingo Uchida², Tsuyoshi Tsujioka¹ (1.Osaka Kyoiku Univ., 2.Ryukoku Univ.)

Keywords:vapor integration, metal-atom desorption, surface glass transition temperature