[16p-P6-1~22] 12.1 Fabrications and Structure Controls

[16p-P6-22] Temperature Evaluation of Incident Molecules in the Formation of Thin Organic Films

〇(M1)Takahiro Abe¹, Munetaka Hayakawa², Akihumi Shimoyama², Takaaki Tanaka², Akira Tsuji², Yoshikazu Takahashi³, Ryosuke Matsubara¹, Atsushi Kubono¹ (1.Shizuoka Univ., 2.Kojima Inds Corp., 3.TI Corp.)

Keywords:organic thin film, formation of thin films, thermal accommodation