Tomoki Oku

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 3:30 PM P3 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-P3-1~7] 13.3 Insulator technology

1:30 PM - 3:30 PM

[19p-P3-6] Surface oxidation of silicon nitride films under high temperature and humid environment

〇Tomoki Oku¹, Toshihiko Shiga¹, Masahiro Totsuka¹, Hitoshi Watanabe¹ (1.Mitsubishi Electric)