Toshimitsu Mochizuki

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S221 (S2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20a-S221-1~12] 13.3 Insulator technology

9:45 AM - 10:00 AM

[20a-S221-4] Evaluation of Si MOS interface using Laser Terahertz Emission Microscope (LTEM)

〇Toshimitsu Mochizuki¹, Akira Ito², Hidetoshi Nakanishi², Katsuhito Tanahashi¹, Iwao Kawayama³, Masayoshi Tonouchi³, Katsuhiko Shirasawa¹, Hidetaka Takato¹ (1.AIST, 2.SCREEN Hldgs., 3.ILE, Osaka Univ.)

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