Makoto Satake

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 2:30 PM - 5:45 PM W621 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[19p-W621-1~12] 8.4 Plasma etching

3:30 PM - 3:45 PM

[19p-W621-5] Degradation of Perpendicular Magnetic Anisotropy in CoFeB Film after He/H₂ Plasma Irradiation

〇Makoto Satake^1,2, Masaki Yamada¹ (1.Hitachi High-Tech., 2.Osaka Univ.)