Shingo Ogawa

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 3:30 PM P3 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-P3-1~7] 13.3 Insulator technology

1:30 PM - 3:30 PM

[19p-P3-1] Study of thermal diffusion of germanium and oxygen atoms in HfO₂/GeO₂/Ge stacks

〇Shingo Ogawa^1,2, Ryohei Asahara², Yuya Minoura², Hideki Sako¹, Naohiko Kawasaki¹, Ichiko Yamada¹, Takashi Miyamoto¹, Takuji Hosoi², Takayoshi Shimura², Heiji Watanabe² (1.TRC, 2.Osaka Univ.)