[Pt-8] Hightec Systems Corporation ANNEALSYS Rapid Thermal Processing/Annealing system & Direct Liquid Injection System, Ultratech Atomic Layer Deposition System Bookmark
[Pa-8] HORIBA, Ltd. Microscope Laser Raman Spectrometer, GD-OES, Cathodeluminescence(CL), Gratings, Mass Flow Controller Bookmark
[Pt-11] HTL Co. Japan Ltd. Benchtop Atomic Layer Deposition Tools (GEMStar XT/XT-P Plasma ALD) , Pulse Laser Deposition Tools (SMP700/800), Scanning Acoustic Microscopy (SAM300) , Photo-Curable Nanoimprint Resist (mr NIL210)... Bookmark