Thickness dependence of AlN crystal quality fabricated by Elementary Source Vapor Phase Epitaxy (ESVPE)

Presentation information

Oral presentation

15 Crystal Engineering » 15.1 Bulk crystal growth

Sat. Mar 19, 2016 9:45 AM - 11:45 AM H112 (H)

Yuui Yokota(Tohoku Univ.)

9:45 AM - 10:00 AM

〇(M1)Katsuhiro Kishimoto¹, PeiTsen Wu¹, Mitsuru Funato¹, Yoichi Kawakami¹ (1.Kyoto Univ.)

Keywords:Bulk AlN