The 63rd JSAP Spring Meeting, 2016

Presentation information

Poster presentation

7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication(Poster)

[19a-P1-1~17] 7 Beam Technology and Nanofabrication(Poster)

Sat. Mar 19, 2016 9:30 AM - 11:30 AM P1 (Gymnasium)

9:30 AM - 11:30 AM

[19a-P1-5] Quick X-ray reflectometry and its applications

Kenji Sakurai1 (1.NIMS)

Keywords:realtime analysis,dynamics,glass transition

X-ray reflectivity technique is powerful in exploring buried layers and interfaces in function thin films. So far, it has been belivend that realtime analyis is extremly difficult. The present paper reports the latest instrumentation as well as some applications.