[19a-W331-1~12] 12.7 Biomedical Engineering and Biochips

[19a-W331-3] Fabrication of Sensing Devices with a Metal-Gap-Insulator-Semiconductor Structure

〇Shoko Ishimaru¹, Miho Morita¹, Kentaro Kawai¹, Kenta Arima¹, Mizuho Morita¹ (1.Osaka Univ.)

Keywords:sensing device