2:45 PM - 3:00 PM
[19p-H112-7] Evaluation of SAW Properties of Metal-Doped LiTaO3 Substrates
Keywords:LiTaO3,Metal-doped,SAW velocity
Metal-doped LT single crystal is grown by the Czochralski method, and SAW velocity of the substrates is evaluated by measuring the frequency characteristics of SAW devices.