<em>In Situ</em> High-Resolution Transmission Electron Microscopy of Si/Si Friction

Koichi Onda; Megumi Fukuta; Tokushi Kizuka

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[19p-H113-1~9] 6.5 Surface Physics, Vacuum

Sat. Mar 19, 2016 1:15 PM - 3:45 PM H113 (H)

Yoichi Yamada(Univ. of Tsukuba)

2:00 PM - 2:15 PM

[19p-H113-4] In Situ High-Resolution Transmission Electron Microscopy of Si/Si Friction

〇Koichi Onda¹, Megumi Fukuta², Tokushi Kizuka³ (1.Grad. Sch. of Univ. of Tsukuba, 2.Nippon Inst. Tech., 3.Univ. of Tsukuba)

Keywords:friction,silicon,transmission electron microscopy

We observed the process of Si/Si friction using in situ high-resolution transmission electron microscopy. We estimate the friction force and friction coefficient.