[19p-H116-1~14] 3.1 Basic optics and frontier of optics

△ [19p-H116-13] High-Resolution Observation of Ultrafine Bubble by Electron Beam Irradiation

〇(M1)Naoto Hara¹, Masahiro Fukuta¹, Wataru Inami^1,2, Yoshimasa Kawata^1,2, Hideaki Kobayashi³, Shigeo Maeda³, Toshihiro Fujita³ (1.Graduate School of Engineering, Shizuoka Univ., 2.Research Institute of Electronics, 3.IDEC Inc.)

Keywords:Ultrafine bubble,Super-resolution microscope

We observed Ultrafine bubbles whose diameter are frequently less than 200 nm. This observation technique realizes Irradiation of focused electron beam on samples in liquid and high-resolution imaging. Several circular images whose size were roughly 1 μm saw in a CL image. And in a backscattered electron image, signal dicreased at the same locations of the circular images. Therefore it's considered that we suceeded to image ultrafine bubbles attached on a surface because air generate strong CL and relatively don't return backscattered electron comparing with water.