[19p-H137-1~17] 7.1 X-ray technologies

[19p-H137-5] Design of high efficiency diffraction grating overcoated with oxide film for constant deviation monochromator in 80~200 eV region

〇Masato Koike¹, Tetsuya Nagano², Hiroyuki Sasai², Ryuichi Ukita² (1.QuBS,JAEA, 2.Shimadzu Corp.)

Keywords:diffraction grating,soft X-ray,diffraction efficiency

In research on trace boron in the various materials, it is essential spectroscopic studies around K emission (183eV) or absorption (188 eV). In this report we investigated the possibilities to enhance the throughput of the constant deviation monochromators which are often used at the synchrotron radiation beamlines using varied-line-spacing (VLS) plane gratings. It was found that laminar-type metal coated gratings by overcoating with transparent materials having high densities, e. g., diamond-like carbon (DLC), TiO₂ and CeO₂ attain better diffraction efficiencies compared with the conventional metal-coated gratings in this region by the numerical calculations.