[19p-P12-1~27] 21.1 Joint Session K

[19p-P12-1] Evaluation of kinetic energy of H₂O beam produced by a Pt-catalyzed H₂ - O₂ reaction

〇Kanji Yasui¹, Yusuke Teraguchi¹, Ryouichi Tajima¹, Yasuhiro Tamayama¹ (1.Nagaoka Univ. Technol.)

Keywords:catalytic reaction,de Laval nozzle,Si-membrane pressure sensor

We have developed a new CVD method for metal oxide film growth using the exothermic reaction between metal-organic gas and high-temperature H₂O generated by a Pt-catalyzed exothermic H₂-O₂ reaction. The resulting thin films, such as ZnO films grown on a-plane (11-20) sapphire (a-Al₂O₃) substrates, exhibited excellent optical and electronic properties. The high-temperature H₂O is generated in a catalytic cell and is effused through a de Laval nozzl to the reaction zone in the CVD chamber. In this report, the kinetic energy of the H₂O beam effused from the de Laval nozzle was measured using a Si-membrane type pressure sensor.