[19p-P12-1~27] 21.1 Joint Session K

[19p-P12-13] Substrate position dependence of crystal quality in ZnO-based films prepared by RF-MS

〇Motonari Shoriki¹, Rei Sugiura¹, Shuhei Funaki¹, Yasuji Yamada¹ (1.Shimane Univ.)

Keywords:Transparent conductive oxide,ZnO,AZO