[19p-P12-1~27] 21.1 Joint Session K

[19p-P12-15] Prototype of the touch sensors using ITO transparent conductive film deposited by the mist deposition

Makoto Nakazumi¹, 〇Yasutaka Nishi¹, Masakazu Hori¹, Yosuke Hayashida¹, Yoshiaki Kito¹, Kei Nara¹, Masaki Kato¹ (1.Nikon.Corp)

Keywords:sensor,TCO