[19p-P4-1~17] 13.5 Semiconductor devices and related technologies

[19p-P4-17] Development of evaluation method for the oxide applying Pulse Photo-Conductivity Method

〇Masahiro Nagano¹, Kojiro Shimizu¹, Masaaki Furuta¹, Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka², Moriya Miyashita³, Koji Izunome³, Takahiro Maeta³ (1.GSST Kumamoto Univ., 2.Faculty of Technology Kumamoto Univ., 3.GWJ)

Keywords:Oxide film evaluation