[19p-P4-1~17] 13.5 Semiconductor devices and related technologies

[19p-P4-9] Precise operation of silicon single-electron pump with ppm accuracy

〇Gento Yamahata¹, Stephen Giblin², Masaya Kataoka², Takeshi Karasawa¹, Akira Fujiwara¹ (1.NTT Basic Research Lab., 2.National Physical Lab.)

Keywords:single electron,current standard,silicon

We evaluated an accuracy of a current generated from a single-electron pump, which comprises silicon nanowire MOSFETs. By comparing a pumping current with a high-accuracy current generated from a standard resistor calibrated by primary standards, we precisely measured the pumping current. The accuracy of the pumping current at 1 GHz is proved to be better than 0.92 ppm, which is the best value for 1-GHz single-electron pumping.