2:30 PM - 2:45 PM
△ [19p-S423-4] Selective growth of Cu by LPCVD using CuI
Keywords:metallization process,copper,LPCVD
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)
Tomoji Nakamura(Fujitsu Lab.), Kuniyuki Kakushima(Titech)