[19p-W631-1~8] IoT Application and Key Technologies

[19p-W631-3] MEMS Vibrational Energy Harvesters for IoT Applications

〇Hiroshi Toshiyoshi¹ (1.Univ. of Tokyo)

Keywords:MEMS,energy harvester,electret

Since April 2015, we study on MEMS energy harvester that could be used as an autonomous power pack for Internet-of-Things type wireless sensor nodes within the framework of NEDO project. We adopted high-density electret in silicon oxide film to develop high-efficiency energy harvesters based on vibrational electrostatic induction. Ionic liquid is newly used within the gap of the electrodes to lower the output impedance though its electrical double-layer capacitor. In this talk, we report on the latest results of the project’s first year.