The 63rd JSAP Spring Meeting, 2016

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9 Applied Materials Science » 9.2 Nanowires and Nanoparticles

[19p-W834-1~17] 9.2 Nanowires and Nanoparticles

Sat. Mar 19, 2016 1:30 PM - 6:00 PM W834 (W8)

Kenichi Kawaguchi(Fujitsu Lab.), Shinjiroh Hara(Hokkaido Univ.)

3:45 PM - 4:00 PM

[19p-W834-9] Fabrication of Si nano pillar using Bio-template Ultimate Top-down Processes and Its Thermal conductivity

〇AKIOU KIKUCHI1,3, Yao Akifumi3, Mori Isamu3, Samukawa Seiji2, Ono Takahito1 (1.GSE, Tohoku Univ., 2.IFS, Tohoku Univ., 3.Central glass)

Keywords:nano pillar