The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20a-H103-1~11] 6.2 Carbon-based thin films

Sun. Mar 20, 2016 9:00 AM - 12:00 PM H103 (H)

Toshimichi Ito(Osaka Univ.)

11:45 AM - 12:00 PM

△ [20a-H103-11] Structural Evaluation of Nitrogenated Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Prepared by Coaxial Arc Plasma Deposition

〇(DC)Hiroki Gima1, Abdelrahman Zkria1,2, Tsuyoshi Yoshitake1 (1.Kyushu Univ., 2.Aswan Univ.)

Keywords:Ultrananocrystalline diamond,Coaxial arc plasma deposition