The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20a-H103-1~11] 6.2 Carbon-based thin films

Sun. Mar 20, 2016 9:00 AM - 12:00 PM H103 (H)

Toshimichi Ito(Osaka Univ.)

11:15 AM - 11:30 AM

△ [20a-H103-9] Improvement of Diamond Nuclei Orientation on 3C-SiC/Si by High Density Plasma

〇Junya Yaita1,2, Takayuki Iwasaki1,2,3, Meralys Natal4, Stephen Saddow4, Mutsuko Hatano1,2,3 (1.Tokyo Tech., 2.CREST, 3.ALCA, 4.Univ. of South Florida)

Keywords:Diamond