Compressive stress stimulation effect on Au induced crystallization for amorphous SixGe1-x films on SiO2 substrate

Kinta Kusano; Kazuki Kudo; Takuya Sakai; Shinichi Motoyama; Yutaka Kusuda; Masahiro Furuta; Nobuyuki Naka; Tomoko Numata; Kenichiro Takakura; Isao Tsunoda

Presentation information

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[20a-H112-1~10] 15.5 Group IV crystals and alloys

Sun. Mar 20, 2016 9:00 AM - 11:30 AM H112 (H)

Masashi Kurosawa(Nagoya Univ.)

9:00 AM - 9:15 AM

[20a-H112-1] Compressive stress stimulation effect on Au induced crystallization for amorphous Si_xGe_1-x films on SiO₂ substrate

〇Kinta Kusano¹, Kazuki Kudo¹, Takuya Sakai¹, Shinichi Motoyama², Yutaka Kusuda², Masahiro Furuta², Nobuyuki Naka³, Tomoko Numata³, Kenichiro Takakura¹, Isao Tsunoda¹ (1.NIT, Kumamoto college, 2.Samco, 3.Horiba)

Keywords:Au induced crystallization,SiGe,compressive stress stimulation

Presentation information

[20a-H112-1~10] 15.5 Group IV crystals and alloys

[20a-H112-1] Compressive stress stimulation effect on Au induced crystallization for amorphous SixGe1-x films on SiO2 substrate

[20a-H112-1] Compressive stress stimulation effect on Au induced crystallization for amorphous Si_xGe_1-x films on SiO₂ substrate