The 63rd JSAP Spring Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[20a-H112-1~10] 15.5 Group IV crystals and alloys

Sun. Mar 20, 2016 9:00 AM - 11:30 AM H112 (H)

Masashi Kurosawa(Nagoya Univ.)

11:00 AM - 11:15 AM

[20a-H112-9] Evaluation of Stress in Thin Strained-Si:C on a Si substrate by Oil-immersion Raman Spectroscopy

〇Shotaro Yamamoto1, Kazuma Takeuchi1, Seiya Ishihara1, Atsushi Ogura1 (1.Meiji Univ.)

Keywords:strain,Si:C,oil-immersion Raman spectroscopy