The 63rd JSAP Spring Meeting, 2016

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Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[20a-P1-1~10] 6.1 Ferroelectric thin films

Sun. Mar 20, 2016 9:30 AM - 11:30 AM P1 (Gymnasium)

9:30 AM - 11:30 AM

[20a-P1-8] Growth of (Hf,Zr)O2 thin films on β- Ga2O3 single crystal substrates

〇Kenshi Takada1, Tomoya Komae1, Takuya Kiguchi1, Yukinori Nose1, Takeshi Yoshimura1, Atsushi Ashida1, Norifumi Fujimura1 (1.Osaka Pref. Univ.)

Keywords:(Hf,Zr)O2,Ga2O3