[20a-P3-1~31] 11 Superconductivity（Poster）

[20a-P3-27] Developments of NIS Micro-Refrigerator V

〇Satoshi Kashiwaya¹, Hiromi Kashiwaya¹, Masao Koyanagi¹ (1.AIST)

Keywords:NIS solid-state refrigerator

We report the development of the suspended normal layer type NIS solid-state refrigerator fabricated by using small scale sputtering system and photolithography. Estimated temperature of normal layer below 0.1 K at the bath temperature of 0.334 K indicated that the cooling process is successfully working in the refrigerator. We found non-equilibrium properties of the superconducting gap based on the analysis of the bath temperature dependence of the NIS junction conductance spectra.