9:30 AM - 11:30 AM
[20a-P4-2] Production of carbonnano-material using supercritical-C2H5OH for new LSI interconnects
Keywords:Supercritical ethyl alcohol,Carbonnano material,Interconnects
Poster presentation
17 Nanocarbon Technology » 17 Nanocarbon Technology(Poster)
Sun. Mar 20, 2016 9:30 AM - 11:30 AM P4 (Gymnasium)
9:30 AM - 11:30 AM
Keywords:Supercritical ethyl alcohol,Carbonnano material,Interconnects