[20a-P4-1~71] 17 Nanocarbon Technology（Poster）

[20a-P4-20] Oxidation of Cu through a Simply Modified Process and Its Effect for Graphene Nucleation in Atmospheric CVD

〇(PC)Seiya Suzuki¹, Yoshifumi Terada¹, Masamichi Yoshimura¹ (1.Toyota Tech. Inst.)

Keywords:graphene,chemical vapor deposition,nucleation

Graphene grown by chemical vapor deposition (CVD) is generally polycrystalline where degrade its high carrier mobility by domain boundaries. Therefore, large-size graphene growth by suppressing nucleation is necessary for its electro/optic applications. Here we report that Ar annealing just before growth process in atmospheric CVD provide effective suppression of graphene nucleation.