9:30 AM - 11:30 AM
[20a-P4-29] Fabrication of graphene nano-disks by bi-layer resist and analysis of their optical properties
Keywords:graphene,nano-structure,optical property
We have developed the graphene nano-disk fabrication process with (HSQ/PMMA) bi-layer resist. This process can decrease the residue of the resist on graphene nano-disk and reduce the size of them. In this paper, we demonstrate the size and shape of the device and optical properties of graphene nano-disks.